Edwards iXL500Q Dry Vacuum Pump. 380-460 V 50/60 Hz 3 Phase Supply.2150 m3h-1 Peak Pumping Speed. Includes: 3/8″ Quick Connect Water Fittings. Edwards PN: AS4501123300

The iXL500Q is a combination dry pump and booster system. The systems are for use on light duty applications and the N variant are fitted with a gas module that supplies nitrogen purge gas to the pump mechanism areas. The stator, motor, and the inverter drives are water cooled. The pumping systems can be controlled by the front panel, a PDT accessory or by the tool via MicroTIM. The dry pump systems are intended for use on load lock and light duty applications. Common applications include Load Lock, Transfer, Metrology, Lithography, PVD Process and PVD Pre-Clean.